Micromachined electromagnetic scanning mirrors
نویسندگان
چکیده
منابع مشابه
Micromachined Deformable Mirrors for Adaptive Optics
Recent progress on deformable mirror systems made at Boston University and Boston Micromachines Corporation is described. The mirror’s optical, electrical, and mechanical performance characteristics are summarized, and the effects of air damping on performance are described. Two applications that have employed the μDM in laser communications and retinal imaging are introduced.
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ژورنال
عنوان ژورنال: Optical Engineering
سال: 1997
ISSN: 0091-3286
DOI: 10.1117/1.601348